Hua Xu
Hua Xu
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Universal control system for integrated circuit manufacturing equipment
Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method
Internal interlocking management method and device for simulation system
Parallelized simulation multithread management method
Method and apparatus for predicting antibiotic performance or critical ingredient content of detergent
Communication mode management method and system for emulating semiconductor manufacturing equipment
Method and device for constructing and managing prototype device library
Simulated batch configuration document management method oriented to semiconductor manufacturing equipment function
Method and device for storing and managing configuration data of simulation system
Etchingmachine cluster controller and process module controller communication system and method
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